Lecture Notes
lecture7.pdf
Description:
Focusses on MEMS devices and technology overview, anisotropic etching, description of the process and testing, silicon nitride as a mechanical material, references.
Resource Type:
Lecture Notes
pdf
870 kB
lecture7.pdf
Course Info
Instructors
As Taught In
Fall
2005
Level
Learning Resource Types
grading
Exam Solutions
grading
Exams
notes
Lecture Notes
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Problem Set Solutions
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Problem Sets
